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  - Altus
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- AMAT
  - Centura
  - Endura
  - LK
  - Mirra Mesa
  - Others
  - Reflexion
- DNS
- LAM / Novellus
  - Altus
  - C2 Sequel
  - C2/C3 Speed
  - OnTrak
  - Sabre
- Others
- Ebara
- Mattson
- TEL
Modify Service

Vector

Right Benzel Sensor Overhaul;15-157053-00;AWC;Lam Vector

‧	HJ S/N：64-21404-10
‧	OEM：15-157053-00
‧	Model：
‧	Brand：Vector

Lift Benzel Sensor Overhaul;02-260645-00;AWC;Lam Vector

‧	HJ S/N：64-21403-10
‧	OEM：02-260645-00
‧	Model：
‧	Brand：Vector

IREPD Overhaul;20704A;MKS;NVLS Vector

‧	HJ S/N：64-20001-10
‧	OEM：
‧	Model：20704A-28818
‧	Brand：Vector;Lam(NVLS)

IREPD Overhaul;20704BN:MKS;CIP;Vector

‧	HJ S/N：64-20002-10
‧	OEM：27-450285-00
‧	Model：20704BN
‧	Brand：Vector;Lam(NVLS)

IREPD Overhaul;20705BN;MKS;NVLS Vector

‧	HJ S/N：64-21129-10
‧	OEM：
‧	Model：20705BN
‧	Brand：Vector;Lam(NVLS)

RMU Controller Overhaul;Robot;Vector

‧	HJ S/N：64-21109-10
‧	OEM：27-356649-00
‧	Model：27-356649-00
‧	Brand：Vector;Lam

MC3E Controller overhaul;02-257935-00;Vector

‧	HJ S/N：64-21114-10
‧	OEM：02-257935-00
‧	Model：02-257935-00
‧	Brand：Vector;Lam

MC3 Controller Overhaul;02-253704-00;Lam Vector

‧	HJ S/N：64-21130-10
‧	OEM：02-253704-00
‧	Model：02-253704-00
‧	Brand：Vector;Lam

MC3R Controller Overhaul;02-321865-00;Vector Express

‧	HJ S/N：64-21131-10
‧	OEM：02-321865-00
‧	Model：02-321865-00
‧	Brand：Vector Express

MC4 Controller Overhaul;02-423402-00;ETHERNET;Vector

‧	HJ S/N：64-21111-10
‧	OEM：02-423402-00
‧	Model：02-423402-00
‧	Brand：Vector

SIOC0 AssyOverhaul;02-252395-00;VECTOR

‧	HJ S/N：64-20404-10
‧	OEM：02-252395-00
‧	Model：02-252395-00
‧	Brand：Vector

HDSIOC 0 Overhaul;02-252395-00;Vector-Express

‧	HJ S/N：64-21102-10
‧	OEM：02-252395-00
‧	Model：02-252395-00
‧	Brand：Vector

SIOC 2 ASSY Overhaul;02-252726-00;Vector

‧	HJ S/N：64-21103-10
‧	OEM：02-252726-00
‧	Model：02-252726-00
‧	Brand：Vector

HDSIOC 2 ASSY Overhaul;02-321648-00;Vector

‧	HJ S/N：64-21104-10
‧	OEM：02-321648-00
‧	Model：02-321648-00
‧	Brand：Vector

HDSIOC 01 ASSY Overhaul;02-321647-00;Vector

‧	HJ S/N：64-21105-10
‧	OEM：02-321647-00
‧	Model：02-321647-00
‧	Brand：Vector

SIOC 1 ASSY Overhaul;02-262491-00;Vector

‧	HJ S/N：64-21106-10
‧	OEM：02-262491-00
‧	Model：02-262491-00
‧	Brand：Vector

HDSIOC 1 Overhaul;02-252396-00;Vector-Express

‧	HJ S/N：64-21110-10
‧	OEM：02-252396-00
‧	Model：02-252396-00
‧	Brand：Vector

SIOC Overhaul;02-252724-00;Vector

‧	HJ S/N：64-21112-10
‧	OEM：02-252724-00
‧	Model：02-252724-00
‧	Brand：Vector

SIOC 2 Assy Overhaul;02-252397-00;Vector-Express

‧	HJ S/N：64-21117-10
‧	OEM：02-252397-00
‧	Model：02-252397-00
‧	Brand：Vector

SIOC2 Overhaul;02-143079-00;Vector

‧	HJ S/N：64-21118-10
‧	OEM：02-143079-00
‧	Model：02-143079-00
‧	Brand：Vector

SIOC Overhaul ; WTS1訊號控制器;02-264834-00;LAM Vector

‧	HJ S/N：64-21119-10
‧	OEM：02-264834-00
‧	Model：02-264834-00
‧	Brand：Vector

HDSIOC 0 Overhaul; 02-321646-00; Vector

‧	HJ S/N：64-21120-10
‧	OEM：02-321646-00
‧	Model：02-321646-00
‧	Brand：Vector

MACH1 EIOC 0 Overhaul;02-390122-00;Vector;Lam

‧	HJ S/N：64-21122-10
‧	OEM：02-390122-00
‧	Model：02-390122-00
‧	Brand：Vector

PT EIOC 0 Overhaul;64-422138-00;Vector;Lam

‧	HJ S/N：64-21123-10
‧	OEM：64-422138-00
‧	Model：64-422138-00
‧	Brand：Vector

EIOC 1 Overhaul; 61-384817-00;Extreme Vector;Lam

‧	HJ S/N：64-21124-10
‧	OEM：61-384817-00
‧	Model：61-384817-00
‧	Brand：Vector

E-Net EIOC 3 Overhaul;61-380630-00;Excel Vector;Lam

‧	HJ S/N：64-21125-10
‧	OEM：61-380630-00
‧	Model：61-380630-00
‧	Brand：Vector

MACH1 EIOC 1 Overhaul;61-358683-00;Excel Vector;Lam

‧	HJ S/N：64-21126-10
‧	OEM：61-358683-00
‧	Model：61-358683-00
‧	Brand：Vector

EIOC 0 Overhaul;61-410957-00;Excel Vector;Lam

‧	HJ S/N：64-21127-10
‧	OEM：61-410957-00
‧	Model：61-410957-00
‧	Brand：Vector

EIOC 1 Overhaul;61-437477-00;Excel Vector;Lam

‧	HJ S/N：64-21128-10
‧	OEM：61-437477-00
‧	Model：61-437477-00
‧	Brand：Vector

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