耗材產品(舊)

LAM / Novellus

Vector

Ground Strip RF;
LAM Vector

HJ P/N : 64-15101-10

OnTark

Wafer Transfer
Station;B1/B2
(長快拆)

HJ P/N : 71-10003-11

Wafer Transfer 
Station;B2/Spin
(短快拆)

HJ P/N : 71-10004-11