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Product

Repair Service
- AMAT
  - Centura
  - Endura
  - LK
  - Mirra
  - Mesa
  - Reflexion
  - Semi Tool
  - Others
- Ebara
- KE
- AKT
- ASML
- DNS
- TEL
- Others
- LAM/Novellus
  - Altus
  - C2 Sequel
  - C2/C3 Speed
  - GAMMA
  - Lam-Other
  - OnTrak
  - Sabre
  - Vector
  - Others
- SE
- Mattson
- SEZ
- ASM
Sales services
- AMAT
  - Centura
  - Endura
  - LK
  - Mirra Mesa
  - Others
  - Reflexion
- DNS
- LAM / Novellus
  - Altus
  - C2 Sequel
  - C2/C3 Speed
  - OnTrak
  - Sabre
- Others
- Ebara
- Mattson
- TEL
Modify Service

AMAT

Mirra/Mesa

Down Force
Measurement

HJ P/N : 13-10002-00

Hard Stopper

HJ P/N : 14-30002-00-12
OEM P/N:0010-77380

Reflexion

Wafer Idle Roller Assy.
OEM Type

HJ P/N : 11-10001-11-4

飽壓測試機 ;Head Vacuum
Tester

HJ P/N : 80-10009-00

LK

Holder Assy.;
Welding Type;DDF3

HJ P/N : 12-10101-11

PEEK Spring 墊片;
DDF3 LK Diaphragm

HJ P/N : 12-300003-10-1

中空座;DDF3 LK
Diaphragm type

HJ P/N : 12-30003-10-5

中心軸;DDF3 LK
Diaphragm type

HJ P/N : 12-30003-10-15

Pusher Tip;
Cleaner;LK

HJ P/N : 12-10102-10

Endura

Flow Switch Assembly

HJ P/N : 16-40002-00

Fedthru;Encore;
Endura 5500

HJ P/N : 29-10001-10
OEM P/M : 0190-13558